Semiconductor wafer and microelectronics fabrication is a demanding process with little room for mistakes. The industry depends on high-performing monitoring and measurement instrumentation for precise chemical compositions and atmospheric conditions.
Vaisala offers trusted and reliable measurements for semiconductor manufacturers and MEMS foundries, semiconductor equipment vendors, fab operators, and material suppliers.
The semicon process refractometers are for in-line concentration monitoring in bulk chemical and slurry delivery dispensing, and point-of-use blending, spiking, and polishing processes.
Vaisala's accurate measurement instruments of air pressure, temperature, and humidity provide precise data on the manufacturing environment and offer superior accuracy, long-term stability, and rapid response time.
Semiconductor wafer plants consume tons of chemicals throughout the whole fab process. The reliability of each chemical solution is top concern of fabs, as even the slightest deviation from specification can result in expensive equipment contamination and wafer scrap.
Integrated circuit pattern quality in semiconductor manufacturing depends on the stepper conditions. Enhance precision air conditioning and wafer stepper process capacity with accurate air pressure, temperature, and humidity measurement.
If you are using compressed air or nitrogen process lines, dew point measurement will help you save resources by avoiding excessive air drying and corrosion of the equipment. Vaisala’s DRYCAP technology enables quick response time with accuracy and low maintenance needs.
Insufficient ventilation decreases not only employee well-being but also productivity substantially, as much 18%. With accurate humidity, CO2, and temperature measurement using reliable, durable, and traceable HVAC sensors, both energy efficiency and employee well-being can be achieved simultaneously.
Vaisala is a deep expert of the semiconductor industry and a trusted partner for our customers.
We have a thorough, inside-out understanding of the business by designing and manufacturing products
to different critical semiconductor processes from chemicals and process quality monitoring to ambient air monitoring.
Our process understanding is completed by our own in-house cleanroom and manufacturing high-quality microchips
to Vaisala products and for R&D purposes.
Vaisala is committed to supporting products throughout the entire lifecycle,
and superior services and support is offered locally near you.
Case example of high-purity gases in process industry
Some of the most challenging industrial processes, such as pure gas production or semiconductor fabrication, require very accurate measurements of trace moisture levels.
The client: China Electronics System Engineering CEFOF and semiconductor manufacturer Beijing Memory Technologies, Inc. (BJMT) The challenge: create a cleanroom environment with a monitoring system capable of monitoring really tight temperature and relative humidity tolerancesThe solution: Vaisala HMT370EX, Vaisala HMT120 and Vaisala HMT330. All perfect for the challenging process conditions delivering superior measurements
RI measurement is a simple, cost-effective, and accurate technique that provides real-time information on slurry composition, making a refractometer the metrology instrument of choice for many fabrication plants.
Accurate and fast RI and RH measurements for optimized CMP tool performance
Did you know that the refractive index or RI measurement with an inline process refractometer is a safe, cost-effective,
real-time, low-maintenance process monitoring method to accurately determine wet chemical concentrations?
In this blog, we look at Vaisala’s range of humidity and pressure sensors that ensure accurate measurements for manufacturers of the machines used to produce semiconductors.
To avoid issues with product quality and yield, moisture and temperature levels must be monitored extremely carefully in semiconductor manufacturing fabrications.
Register for this webinar to learn why Vaisala process refractometers have been installed by hundreds of semiconductor manufacturers worldwide. We’ll review the technology behind our measurement solutions and share common applications before sharing sample use cases from fabricators.
Join this webinar and learn about different techniques for best measurement accuracy and quality, practical solutions for maintaining optimal manufacturing conditions in cleanroom and dry room conditions, and how to choose the right product for your application.
Interested to receive more information on a specific application or product? Drop us a line, and we'll get back to you!