Solutions for semiconductor process, facility monitoring and control

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Semiconductor wafer and microelectronics fabrication is a demanding process with little room for mistakes. The industry depends on high-performing monitoring and measurement instrumentation for precise chemical compositions and atmospheric conditions. 

Vaisala offering for semiconductor manufacturing

Vaisala offers trusted and reliable measurements for semiconductor manufacturers and MEMS foundries, semiconductor equipment vendors, fab operators, and material suppliers. 

The semicon process refractometers are for in-line concentration monitoring in bulk chemical and slurry delivery dispensing, and point-of-use blending, spiking, and polishing processes. 

Vaisala's accurate measurement instruments of air pressure, temperature, and humidity provide precise data on the manufacturing environment and offer superior accuracy, long-term stability, and rapid response time.

Applications

Why Vaisala?

Vaisala is a deep expert of the semiconductor industry and a trusted partner for our customers.
We have a thorough, inside-out understanding of the business by designing and manufacturing products
to different critical semiconductor processes from chemicals and process quality monitoring to ambient air monitoring.

Our process understanding is completed by our own in-house cleanroom and manufacturing high-quality microchips
to Vaisala products and for R&D purposes.

Vaisala is committed to supporting products throughout the entire lifecycle,
and superior services and support is offered locally near you.  

Semiconductor manufacturing related products

Indigo520 with probe

Indigo500 Series Transmitters

The Vaisala Indigo500 series transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. The Indigo500 series include multi-functional Indigo520 transmitter and Indigo510 transmitter with basic features.
Humidity and Temperature Probe HMP110 with cable

Humidity and Temperature Probe HMP110

The Vaisala HUMICAP® Humidity and Temperature Probe HMP110 is a trouble-free and cost-effective humidity transmitter with high accuracy and good stability. The power consumption is low and it has fast startup for battery-powered applications.
Vaisala Differential Pressure Transmitter PDT102

Differential Pressure Transmitter PDT102

A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS silicon sensor technology that provides superior accuracy, sensitivity, stability and durability.

More information

Expert article

Boost wafer quality and yield through data-driven real-time slurry management

The composition of the slurry used in the chemical mechanical polishing (CMP) processing step greatly impacts wafer quality. Vaisala's inline process refractometers enable real-time monitoring of slurry composition, ensuring batch-to-batch consistency and optimal wafer quality.

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Expert article

How to improve humidity measurements in extremely dry environments

Case example of high-purity gases in process industry

Some of the most challenging industrial processes, such as pure gas production or semiconductor fabrication, require very accurate measurements of trace moisture levels.

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Customer case

Exceeding the high-precision demands of integrated circuit manufacturing: the role of Vaisala’s instruments in cleanrooms Semiconductor manufacturing

The client: China Electronics System Engineering CEFOF and semiconductor manufacturer Beijing Memory Technologies, Inc. (BJMT) 
The challenge: create a cleanroom environment with a monitoring system capable of monitoring really tight temperature and relative humidity tolerances
The solution: Vaisala HMT370EX, Vaisala HMT120 and Vaisala HMT330. All perfect for the challenging process conditions delivering superior measurements

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Customer case

Why Vaisala is a preferred vendor for many semiconductor fabrication plants for qualifying H2O2 concentration in CMP of tungsten

RI measurement is a simple, cost-effective, and accurate technique that provides real-time information on slurry composition, making a refractometer the metrology instrument of choice for many fabrication plants.

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eGuide

Understand and utilize real-time data in CMP process

Accurate and fast RI and RH measurements for optimized CMP tool performance  

Did you know that the refractive index or RI measurement with an inline process refractometer is a safe, cost-effective,
real-time, low-maintenance process monitoring method to accurately determine wet chemical concentrations? 

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Blog

Quality semiconductor products need quality machinery enhanced with the best monitoring equipment

In this blog, we look at Vaisala’s range of humidity and pressure sensors that ensure accurate measurements for manufacturers of the machines used to produce semiconductors.

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Blog

Water is one of the most significant contaminants in semiconductor manufacturing – measure your moisture, humidity and temperature accurately

To avoid issues with product quality and yield, moisture and temperature levels must be monitored extremely carefully in semiconductor manufacturing fabrications. 

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Webinar

Optimize Wafer Quality and Yield with Real-time Data During the CMP Process

Register for this webinar to learn why Vaisala process refractometers have been installed by hundreds of semiconductor manufacturers worldwide. We’ll review the technology behind our measurement solutions and share common applications before sharing sample use cases from fabricators.

Register to watch

Webinar

Ensure your yield in semiconductor and battery manufacturing

Join this webinar and learn about different techniques for best measurement accuracy and quality, practical solutions for maintaining optimal manufacturing conditions in cleanroom and dry room conditions, and how to choose the right product for your application.

Register to watch

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Interested to receive more information on a specific application or product? Drop us a line, and we'll get back to you!

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