Solutions for semiconductor process, facility monitoring and control
Semiconductor wafer and microelectronics fabrication is a demanding process with little room for mistakes. The industry depends on high-performing monitoring and measurement instrumentation for precise chemical compositions and atmospheric conditions. We offer semicon process refractometers for in-line concentration monitoring in bulk chemical and slurry delivery dispensing, and point-of-use blending, spiking and polishing processes; as well as instruments for measuring humidity, dew point, temperature and pressure within and surrounding the semiconductor tools and facilities.
Wet chemistries real-time
Semiconductor wafer plants consume tons of chemicals throughout the whole fab process. The reliability of each chemical solution is top concern of fabs, as even the slightest deviation from specification can result in expensive equipment contamination and wafer scrap.
Wafer quality in photolithography
Integrated circuit pattern quality in semiconductor manufacturing depends on the stepper conditions. Enhance precision air conditioning and wafer stepper process capacity with accurate air pressure, temperature, and humidity measurement.
Compressed air and N2 process lines
If you are using compressed air or nitrogen process lines, dew point measurement will help you save resources by avoiding excessive air drying and corrosion of the equipment. Vaisala’s DRYCAP technology enables quick response time with accuracy and low maintenance needs.
Facility control
Insufficient ventilation decreases not only employee well-being but also productivity substantially, as much 18%. With accurate humidity, CO2, and temperature measurement using reliable, durable, and traceable HVAC sensors, both energy efficiency and employee well-being can be achieved simultaneously.
Why Vaisala?
Vaisala is a deep expert of the semiconductor industry and a trusted partner for our customers. We have a thorough, inside-out understanding of the business by designing and manufacturing products to different critical semiconductor processes from chemicals and process quality monitoring to ambient air monitoring. Our process understanding is completed by our own in-house cleanroom and manufacturing high-quality microchips to Vaisala products and for R&D purposes. Vaisala is committed to supporting products throughout the entire lifecycle, and superior services and support is offered locally near you.
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