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The composition of the slurry used in the chemical mechanical polishing (CMP) processing step greatly impacts wafer quality. Vaisala's inline process refractometers enable real-time monitoring of slurry composition, ensuring batch-to-batch consistency and optimal wafer quality.

Case example of high-purity gases in process industry

Some of the most challenging industrial processes, such as pure gas production or semiconductor fabrication, require very accurate measurements of trace moisture levels.

The client: China Electronics System Engineering CEFOF and semiconductor manufacturer Beijing Memory Technologies, Inc. (BJMT) 
The challenge: create a cleanroom environment with a monitoring system capable of monitoring really tight temperature and relative humidity tolerances
The solution: Vaisala HMT370EX, Vaisala HMT120 and Vaisala HMT330. All perfect for the challenging process conditions delivering superior measurements

RI measurement is a simple, cost-effective, and accurate technique that provides real-time information on slurry composition, making a refractometer the metrology instrument of choice for many fabrication plants.

Accurate and fast RI and RH measurements for optimized CMP tool performance  

Did you know that the refractive index or RI measurement with an inline process refractometer is a safe, cost-effective,
real-time, low-maintenance process monitoring method to accurately determine wet chemical concentrations? 

In this blog, we look at Vaisala’s range of humidity and pressure sensors that ensure accurate measurements for manufacturers of the machines used to produce semiconductors.

To avoid issues with product quality and yield, moisture and temperature levels must be monitored extremely carefully in semiconductor manufacturing fabrications. 

Register for this webinar to learn why Vaisala process refractometers have been installed by hundreds of semiconductor manufacturers worldwide. We’ll review the technology behind our measurement solutions and share common applications before sharing sample use cases from fabricators.

Join this webinar and learn about different techniques for best measurement accuracy and quality, practical solutions for maintaining optimal manufacturing conditions in cleanroom and dry room conditions, and how to choose the right product for your application.