Solutions for semiconductor process, facility monitoring and control


Semiconductor wafer and microelectronics fabrication is a demanding process with little room for mistakes. The industry depends on high-performing monitoring and measurement instrumentation for precise chemical compositions and atmospheric conditions. 

Vaisala offering for semiconductor manufacturing

Vaisala offers trusted and reliable measurements for semiconductor manufacturers and MEMS foundries, semiconductor equipment vendors, fab operators, and material suppliers. 

The semicon process refractometers are for in-line concentration monitoring in bulk chemical and slurry delivery dispensing, and point-of-use blending, spiking, and polishing processes. 

Vaisala's accurate measurement instruments of air pressure, temperature, and humidity provide precise data on the manufacturing environment and offer superior accuracy, long-term stability, and rapid response time.


Why Vaisala?

Vaisala is a deep expert of the semiconductor industry and a trusted partner for our customers.
We have a thorough, inside-out understanding of the business by designing and manufacturing products
to different critical semiconductor processes from chemicals and process quality monitoring to ambient air monitoring.

Our process understanding is completed by our own in-house cleanroom and manufacturing high-quality microchips
to Vaisala products and for R&D purposes.

Vaisala is committed to supporting products throughout the entire lifecycle,
and superior services and support is offered locally near you.  

Semiconductor manufacturing related products

Indigo520 with probe

Indigo500 Series Transmitters

The Vaisala Indigo500 series transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. The Indigo500 series include multi-functional Indigo520 transmitter and Indigo510 transmitter with basic features.
Humidity and Temperature Probe HMP110 with cable

Humidity and Temperature Probe HMP110

The Vaisala HUMICAP® Humidity and Temperature Probe HMP110 is a trouble-free and cost-effective humidity transmitter with high accuracy and good stability. The power consumption is low and it has fast startup for battery-powered applications.
Vaisala Differential Pressure Transmitter PDT102

Differential Pressure Transmitter PDT102

A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS silicon sensor technology that provides superior accuracy, sensitivity, stability and durability.

More information

Expert article

Boost wafer quality and yield through data-driven real-time slurry management

The composition of the slurry used in the chemical mechanical polishing (CMP) processing step greatly impacts wafer quality. Vaisala's inline process refractometers enable real-time monitoring of slurry composition, ensuring batch-to-batch consistency and optimal wafer quality.

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Så här förbättrar du fuktighetsmätningar i extremt torra miljöer

Fallexempel på högrena gaser inom processindustrin 

Några av de mest utmanande industriella processerna, såsom ren gasproduktion eller halvledartillverkning, kräver mycket noggranna mätningar av spårfuktighetsnivåer.

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Överträffar högprecisionskraven för tillverkning av integrerade kretsar: Rollen för Vaisalas instrument i renrum

Kunden: China Electronics System Engineering CEFOF och halvledartillverkaren Beijing Memory Technologies, Inc. (BJMT) 
Utmaningen: Att skapa en renrumsmiljö med ett övervakningssystem som kan övervaka mycket begränsade toleranser för temperatur och relativ luftfuktighet
Lösningen: Vaisala HMT370EX, Vaisala HMT120 och Vaisala HMT330. Samtliga perfekta för de utmanande processförhållandena för leverans av överlägsna mätningar

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Customer case

Why Vaisala is a preferred vendor for many semiconductor fabrication plants for qualifying H2O2 concentration in CMP of tungsten

RI measurement is a simple, cost-effective, and accurate technique that provides real-time information on slurry composition, making a refractometer the metrology instrument of choice for many fabrication plants.

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Understand and utilize real-time data in CMP process

Accurate and fast RI and RH measurements for optimized CMP tool performance  

Did you know that the refractive index or RI measurement with an inline process refractometer is a safe, cost-effective,
real-time, low-maintenance process monitoring method to accurately determine wet chemical concentrations? 

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Quality semiconductor products need quality machinery enhanced with the best monitoring equipment

In this blog, we look at Vaisala’s range of humidity and pressure sensors that ensure accurate measurements for manufacturers of the machines used to produce semiconductors.

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Water is one of the most significant contaminants in semiconductor manufacturing – measure your moisture, humidity and temperature accurately

To avoid issues with product quality and yield, moisture and temperature levels must be monitored extremely carefully in semiconductor manufacturing fabrications. 

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Optimize Wafer Quality and Yield with Real-time Data During the CMP Process

Register for this webinar to learn why Vaisala process refractometers have been installed by hundreds of semiconductor manufacturers worldwide. We’ll review the technology behind our measurement solutions and share common applications before sharing sample use cases from fabricators.

Register to watch


Säkerställ avkastning vid tillverkning av halvledare och batterier

Delta i detta webbseminarium och få information om olika tekniker för bästa mätnoggrannhet och kvalitet, praktiska lösningar för att bibehålla optimala tillverkningsförhållanden i renrum och torkrum och hur du väljer rätt produkt för din applikation.

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