European CMP and WET Users Group Meeting 

Vaisala partners - VIM semiconductor
Abbaye de Royaumont
Asnières-sur-Oise, France
Liquid Measurements
Semiconductor fabrication
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The European CMP and WET Users Group serves as an open platform for professionals engaged with these technologies in their daily work. Whether you are a process expert in device manufacturing, involved in tools and consumables, or part of the academic community, this group is your technical home. It offers a unique opportunity to expand your knowledge and build your network.

Vaisala will be present at the meeting showcasing Vaisala measurement solutions. You are welcome to have a chat.

Read more about European CMP and WET Users Group Meeting

semiconductor wafer close-up

Semiconductor manufacturing

Pressure, temperature, humidity, and liquid concentration measurements for increased yield, safety, and best-performing semiconductor products. 
 

Go to semiconductor applications
Semiconductor wafers

Why Vaisala is a preferred vendor for many semiconductor fabrication plants for qualifying H2O2 concentration in CMP of tungsten

Chip quality in semiconductor fabrication processes is typically defined as the reduction of variability around target, or in other words, how well the distribution sets between the lower and upper specified limits. Critical to Quality (CTQ) and conformance to customer requirements also play a significant role. Too high variability in manufacturing quickly turns to product quality issues.

To ensure a stable supply of good products to market, thorough quality metrics and process control are needed. One important part of product quality and manufacturing is chemistry. Semiconductor wafer plants consume tons of chemicals throughout the whole fab process. Repeatability and reproducibility of each process is a top concern of fabs, and even the slightest deviation from specification can result in expensive equipment contamination and wafer scrap. 

Read this customer story

Accurate and fast RI and RH measurements for optimized CMP tool performance  

Did you know that the refractive index or RI measurement with an inline process refractometer is a safe, cost-effective,
real-time, low-maintenance process monitoring method to accurately determine wet chemical concentrations? 

Vaisala’s inline process refractometers meet industry standards and can be conveniently integrated into slurry
blenders and CMP tools. 

Relative humidity or RH measurements in slurry blending are critical to avoid slurry evaporation and eventual agglomeration. Recommended products are the Indigo520 with HMP7 and TMP1 for both temperature
and relative humidity measurements directly in the CMP tool. 

In this eBook, we discuss: 

  • RI in process optimization 
  • RH as a critical measurement 
  • Installation position benefits

Download the eBook by filling out the form.

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Indigo520 with probe

Indigo500 Series Transmitters

The Vaisala Indigo500 series transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. The Indigo500 series include multi-functional Indigo520 transmitter and Indigo510 transmitter with basic features.
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Humidity and Temperature Probe HMP110 with cable

Humidity and Temperature Probe HMP110

The Vaisala HUMICAP® Humidity and Temperature Probe HMP110 is a trouble-free and cost-effective humidity transmitter with high accuracy and good stability. The power consumption is low and it has fast startup for battery-powered applications.
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