Vaisala Polaris™ PR53S Semicon Process Refractometer
Real-time, inline chemical concentration measurement for semiconductor wet processes
The Vaisala Polaris™ PR53S is a compact, ultrapure inline refractometer designed for semiconductor liquid chemical applications. Its modified PTFE flow cell and ¼–1 inch pillar or flare connections enable seamless integration into wet benches, chemical distribution systems, and process tools across blending, cleaning, etching, and CMP steps.
The PR53S continuously measures chemical concentration in real time—both in cleanroom environments and within integrated process tools—helping maintain tight process control at every stage.
With highly accurate, reliable, and repeatable measurement, the PR53S can replace complex and costly analyzers in bulk dispensing, blending, and point-of-use monitoring with a single inline refractive index measurement.
Consistent chemical control for demanding chemistries and slurries
Accurate measurement across a wide range of chemicals — including demanding slurry applications. Reliable performance even in the presence of bubbles, particles, or crystals ensures stable, trustworthy data in real-world processes.
Ideal for chemical mixing and monitoring in fine chemical and semiconductor industries, the Polaris PR53S builds on over 40 years of innovation from the Vaisala K-PATENTS® process refractometer series. As part of the latest PR53 generation, it delivers enhanced resolution and improved compatibility for modern process environments.
Key benefits
Designed for semiconductor liquid chemical processes and slurries
Continuous inline concentration measurement for tighter process control
Ultrapure modified PTFE flow cell and compact design for cleanroom and tool‑integrated use
Accurate, repeatable drift‑free refractive index measurement with integrated temperature compensation
Excellent long‑term stability and no moving parts for low maintenance and high uptime
Standalone operation or seamless integration with the Vaisala Indigo520 transmitter and Vaisala Indigo80 handheld indicator
Indigo80 for Vaisala Polaris™ process refractometers
Discover the unmatched combination of Vaisala Indigo80 and Polaris™ process refractometers. With the Indigo80, a screen on the go, configure and calibrate probes without downtime, log data from individual probes for speedy diagnosis, and identify potential maintenance needs easily.
Insight PC Software
Use the free Insight software to have access to your instrument from your desktop, calibrate your PR53S and download new chemical curves.
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