The semiconductor industry uses a broad range of wet processing chemicals, etchants, cleaning agents, and CMP slurries in the manufacture of integrated circuits or silicon chips including silicon wafers.
Using a Vaisala K-PATENTS® Semicon Refractometer for measuring liquid concentration brings great benefits and savings as it helps to:
Vaisala’s application note explains how a semicon refractometer can improve process with recommended installation points for best performance, and shortly introduces the reliable technology our semicon refractometer is based on.
Download the application note for full details.
Discover all applications in Fab chemical process monitoring and fault detection