We’ll begin by highlighting the importance of moisture in semiconductor manufacturing and provide guidance on selecting appropriate humidity and temperature sensors for different FAB zones, emphasizing the need to understand sensor accuracy and uncertainty.
Then we will address maintaining ideal environmental conditions, focusing on the recommended frequency of sensor calibration, comparing onsite versus laboratory calibration methods, and stressing the value of comprehensive training for facilities and engineering teams.
Finally, we’ll dive into troubleshooting strategies, such as mapping large cleanrooms to identify and address temperature and humidity inconsistencies, including hot or cold spots.
What you’ll learn:
- Step 1: Selecting the optimal tools
- Why does moisture matter in your process?
- How to choose the right humidity and temperature sensor for each area of the FAB
- How to decipher accuracy and uncertainty specifications
- Step 2: Maintaining the right conditions
- Sensor calibration frequency
- Calibration options: onsite vs. lab
- Training for facilities and engineering teams
- Step 3: Troubleshooting problem areas
- Mapping large cleanrooms to find hot or cold spots
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