Semiconductor tool processing a wafer
Kuala Lumpur, Malaysia
Industrial Manufacturing and Processes
Industrial Measurements
Liquid Measurements

Join us at SEMICON SEA 2024! Explore innovative measurement solutions at booth 320 by Vaisala and our partner Dpstar. Engage with our team, discover cutting-edge tech, and forge new partnerships.

SEMICON Southeast Asia is the premier event that promotes the growth of the semiconductor and microelectronics ecosystem in Southeast Asia by connecting companies, suppliers, and buyers from across the supply chain - from R&D and design to manufacturing and application development.

We look forward to seeing you there!

Indigo family video

Vaisala Indigo family includes intelligent, interchangeable measurement probes, optional host devices and free Vaisala Insight PC Software. Having measurement intelligence within the probes means that they are easy to remove, compatible with Indigo host devices and can be integrated into other systems too.

Watch the video or read more!

Vaisala offering for semiconductor manufacturing 

Accurate and fast RI and RH measurements for optimized CMP tool performance  

Did you know that the refractive index or RI measurement with an inline process refractometer is a safe, cost-effective,
real-time, low-maintenance process monitoring method to accurately determine wet chemical concentrations? 

Vaisala’s inline process refractometers meet industry standards and can be conveniently integrated into slurry
blenders and CMP tools. 

Relative humidity or RH measurements in slurry blending are critical to avoid slurry evaporation and eventual agglomeration. Recommended products are the Indigo520 with HMP7 and TMP1 for both temperature
and relative humidity measurements directly in the CMP tool. 

In this eBook, we discuss: 

  • RI in process optimization 
  • RH as a critical measurement 
  • Installation position benefits

Download the eBook by filling out the form.

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