Semiconductor Tool Monitoring

Accurate and stable measurement devices enable close control of the microenvironments surrounding semiconductor tools. 

Vaisala provides compact OEM modules for relative humidity and barometric pressure.

Semiconductor tool monitoring related products

Vaisala HUMICAP® HM70 Handheld humidity meter is designed for demanding humidity measurement in spot-checking applications.

Handheld Humidity and Temperature Meter HM70

Vaisala HUMICAP® HM70 Handheld is designed for demanding humidity measurement in spot-checking applications. It is also ideal for field checking and calibration of Vaisala's fixed humidity instruments.

Indigo520 with probe

Indigo500 Series Transmitters

The Vaisala Indigo500 series transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. The Indigo500 series include multi-functional Indigo520 transmitter and Indigo510 transmitter with basic features.

Dew Point Transmitter DMT152

The Vaisala DRYCAP® Dewpoint Transmitter DMT152 is designed for measuring low dew point in OEM applications, even down to -80°C.

Humidity and Temperature Probe HMP110

Humidity and Temperature Probe HMP110

The Vaisala HUMICAP® Humidity and Temperature Probe HMP110 is a trouble-free and cost-effective humidity transmitter with high accuracy and good stability. The power consumption is low and it has fast startup for battery-powered applications.

Differential Pressure Transmitter PDT102

A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS silicon sensor technology that provides superior accuracy, sensitivity, stability and durability.

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