Semiconductor Tool Monitoring

Accurate and stable measurement devices enable close control of the microenvironments surrounding semiconductor tools. 

Vaisala provides compact OEM modules for relative humidity and barometric pressure.

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Dew Point and Temperature Probe DMP7

for Remote Installations in Tight Spaces
Vaisala DRYCAP® Dew Point and Temperature Probe DMP7 is made for tight spaces and low-humidity applications. Its short probe length makes it suitable...
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Dew Point and Temperature Probe DMP8

with Adjustable Installation Depth for Pressurized Pipelines <40 bars
Vaisala DRYCAP® Dew Point and Temperature Probe DMP8 is designed for industrial low-humidity applications with pressure up to 40 bars. Typical...
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Humidity and Temperature Probe HMP110

with ±1.5%RH Accuracy for Demanding Volume Applications
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For monitoring temperature, humidity, with optional analog input
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Universal Data Loggers DL4000

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VaiNet Network Access Point for RFL100 data loggers

VaiNet Wireless Access Point AP10

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For trending and analysis of temperature & humidity
Vaisala vLog SP is a powerful, easy-to-use software for downloading, analyzing and reporting information from Vaisala DL-series data loggers. This...
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Differential Pressure Transmitter PDT102

For life science and high technology cleanroom applications
A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS...

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