Semiconductor Tool Monitoring Accurate and stable measurement devices enable close control of the microenvironments surrounding semiconductor tools. Vaisala provides compact OEM modules for relative humidity and barometric pressure. Semiconductor tool monitoring related products Dew Point and Temperature Probe DMP7 Vaisala DRYCAP® Dew Point and Temperature Probe DMP7 is made for tight spaces and low-humidity applications. Dew Point and Temperature Probe DMP8 Vaisala DRYCAP® Dew Point and Temperature Probe DMP8 is designed for industrial low-humidity applications with pressure up to 40 bars. Handheld Humidity and Temperature Meter HM70 Vaisala HUMICAP® HM70 Handheld is designed for demanding humidity measurement in spot-checking applications. It is also ideal for field checking and calibration of Vaisala's fixed humidity instruments. Indigo200 Series Transmitters for Vaisala smart probes Vaisala Indigo200 series transmitters are host devices for displaying measurement values from Vaisala's Smart Humidity, Temperature, Dew Point, Moisture in Oil, CO2 and H2O2 Probes. Indigo500 Series Transmitters The Vaisala Indigo500 series transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. The Indigo500 series include multi-functional Indigo520 transmitter and Indigo510 transmitter with basic features. Dew Point Transmitter DMT152 The Vaisala DRYCAP® Dewpoint Transmitter DMT152 is designed for measuring low dew point in OEM applications, even down to -80°C. Miniature Dew Point Transmitters DMT143 & DMT143L (Long) Miniature size dew point transmitters DMT143 and DMT143L are ideal choices when you want to measure dew point accurately in small compressed air dryers, plastic dryers, additive manufacturing and other OEM applications. Humidity and Temperature Probe HMP110 The Vaisala HUMICAP® Humidity and Temperature Probe HMP110 is a trouble-free and cost-effective humidity transmitter with high accuracy and good stability. The power consumption is low and it has fast startup for battery-powered applications. Differential Pressure Transmitter PDT102 A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS silicon sensor technology that provides superior accuracy, sensitivity, stability and durability. Related stories Blog | Mar 8, 2023 Spot-checking measurements of environmental conditions Field spot-checking is a common way to determine the measurement accuracy of a fixed measurement instrument between calibration intervals... Read more Blog | Jun 2, 2022 Quality semiconductor products need quality machinery enhanced with the best monitoring equipment In an earlier article, we discussed measurement solutions for the semiconductor manufacturing process. In this blog, we look at Vaisala’s range... Read more Blog | Oct 25, 2018 Relative Humidity – What Is It And Why Is It Important? The basics Put simply, relative humidity (RH) is a measure of the water vapor content of air. More explicitly, it is the amount of water vapor... Read more Blog | May 19, 2015 Take a peek inside a Vaisala cleanroom: a video tour of our research, development and manufacturing facilities In this 3-minute video our Facility Manager Hannu dons a bunny suit and gives a tour of the facilities where Vaisala creates some of the world's... Read more Blog | May 14, 2015 Humidity sensors – do you know what's inside? If you don't know, perhaps you should. If you don't know how your humidity sensor works, how can you know that you are using the right humidity... Read more Customer case Continuous monitoring system brings peace of mind “Losing the stock would be just the tip of the iceberg. It would mean a loss of R&D investment, lost client commitments, and missed business... Read more Blog | Aug 24, 2013 Instrument tolerances: manufacturer vs. process This week's blog comes from Vaisala's Calibration and Repair Service department: Using the instrument maker’s tolerance, there is often a higher... Read more Blog | Aug 9, 2013 3 tips to staying sane during a quality audit Our Vancouver calibration laboratory just underwent an audit by an accreditation body. Michael Boetzkes, our North American Calibration and... Read more
Accurate and stable measurement devices enable close control of the microenvironments surrounding semiconductor tools. Vaisala provides compact OEM modules for relative humidity and barometric pressure.
Semiconductor tool monitoring related products Dew Point and Temperature Probe DMP7 Vaisala DRYCAP® Dew Point and Temperature Probe DMP7 is made for tight spaces and low-humidity applications. Dew Point and Temperature Probe DMP8 Vaisala DRYCAP® Dew Point and Temperature Probe DMP8 is designed for industrial low-humidity applications with pressure up to 40 bars. Handheld Humidity and Temperature Meter HM70 Vaisala HUMICAP® HM70 Handheld is designed for demanding humidity measurement in spot-checking applications. It is also ideal for field checking and calibration of Vaisala's fixed humidity instruments. Indigo200 Series Transmitters for Vaisala smart probes Vaisala Indigo200 series transmitters are host devices for displaying measurement values from Vaisala's Smart Humidity, Temperature, Dew Point, Moisture in Oil, CO2 and H2O2 Probes. Indigo500 Series Transmitters The Vaisala Indigo500 series transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. The Indigo500 series include multi-functional Indigo520 transmitter and Indigo510 transmitter with basic features. Dew Point Transmitter DMT152 The Vaisala DRYCAP® Dewpoint Transmitter DMT152 is designed for measuring low dew point in OEM applications, even down to -80°C. Miniature Dew Point Transmitters DMT143 & DMT143L (Long) Miniature size dew point transmitters DMT143 and DMT143L are ideal choices when you want to measure dew point accurately in small compressed air dryers, plastic dryers, additive manufacturing and other OEM applications. Humidity and Temperature Probe HMP110 The Vaisala HUMICAP® Humidity and Temperature Probe HMP110 is a trouble-free and cost-effective humidity transmitter with high accuracy and good stability. The power consumption is low and it has fast startup for battery-powered applications. Differential Pressure Transmitter PDT102 A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS silicon sensor technology that provides superior accuracy, sensitivity, stability and durability.
Dew Point and Temperature Probe DMP7 Vaisala DRYCAP® Dew Point and Temperature Probe DMP7 is made for tight spaces and low-humidity applications.
Dew Point and Temperature Probe DMP8 Vaisala DRYCAP® Dew Point and Temperature Probe DMP8 is designed for industrial low-humidity applications with pressure up to 40 bars.
Handheld Humidity and Temperature Meter HM70 Vaisala HUMICAP® HM70 Handheld is designed for demanding humidity measurement in spot-checking applications. It is also ideal for field checking and calibration of Vaisala's fixed humidity instruments.
Indigo200 Series Transmitters for Vaisala smart probes Vaisala Indigo200 series transmitters are host devices for displaying measurement values from Vaisala's Smart Humidity, Temperature, Dew Point, Moisture in Oil, CO2 and H2O2 Probes.
Indigo500 Series Transmitters The Vaisala Indigo500 series transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. The Indigo500 series include multi-functional Indigo520 transmitter and Indigo510 transmitter with basic features.
Dew Point Transmitter DMT152 The Vaisala DRYCAP® Dewpoint Transmitter DMT152 is designed for measuring low dew point in OEM applications, even down to -80°C.
Miniature Dew Point Transmitters DMT143 & DMT143L (Long) Miniature size dew point transmitters DMT143 and DMT143L are ideal choices when you want to measure dew point accurately in small compressed air dryers, plastic dryers, additive manufacturing and other OEM applications.
Humidity and Temperature Probe HMP110 The Vaisala HUMICAP® Humidity and Temperature Probe HMP110 is a trouble-free and cost-effective humidity transmitter with high accuracy and good stability. The power consumption is low and it has fast startup for battery-powered applications.
Differential Pressure Transmitter PDT102 A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS silicon sensor technology that provides superior accuracy, sensitivity, stability and durability.
Related stories Blog | Mar 8, 2023 Spot-checking measurements of environmental conditions Field spot-checking is a common way to determine the measurement accuracy of a fixed measurement instrument between calibration intervals... Read more Blog | Jun 2, 2022 Quality semiconductor products need quality machinery enhanced with the best monitoring equipment In an earlier article, we discussed measurement solutions for the semiconductor manufacturing process. In this blog, we look at Vaisala’s range... Read more Blog | Oct 25, 2018 Relative Humidity – What Is It And Why Is It Important? The basics Put simply, relative humidity (RH) is a measure of the water vapor content of air. More explicitly, it is the amount of water vapor... Read more Blog | May 19, 2015 Take a peek inside a Vaisala cleanroom: a video tour of our research, development and manufacturing facilities In this 3-minute video our Facility Manager Hannu dons a bunny suit and gives a tour of the facilities where Vaisala creates some of the world's... Read more Blog | May 14, 2015 Humidity sensors – do you know what's inside? If you don't know, perhaps you should. If you don't know how your humidity sensor works, how can you know that you are using the right humidity... Read more Customer case Continuous monitoring system brings peace of mind “Losing the stock would be just the tip of the iceberg. It would mean a loss of R&D investment, lost client commitments, and missed business... Read more Blog | Aug 24, 2013 Instrument tolerances: manufacturer vs. process This week's blog comes from Vaisala's Calibration and Repair Service department: Using the instrument maker’s tolerance, there is often a higher... Read more Blog | Aug 9, 2013 3 tips to staying sane during a quality audit Our Vancouver calibration laboratory just underwent an audit by an accreditation body. Michael Boetzkes, our North American Calibration and... Read more
Blog | Mar 8, 2023 Spot-checking measurements of environmental conditions Field spot-checking is a common way to determine the measurement accuracy of a fixed measurement instrument between calibration intervals... Read more
Blog | Jun 2, 2022 Quality semiconductor products need quality machinery enhanced with the best monitoring equipment In an earlier article, we discussed measurement solutions for the semiconductor manufacturing process. In this blog, we look at Vaisala’s range... Read more
Blog | Oct 25, 2018 Relative Humidity – What Is It And Why Is It Important? The basics Put simply, relative humidity (RH) is a measure of the water vapor content of air. More explicitly, it is the amount of water vapor... Read more
Blog | May 19, 2015 Take a peek inside a Vaisala cleanroom: a video tour of our research, development and manufacturing facilities In this 3-minute video our Facility Manager Hannu dons a bunny suit and gives a tour of the facilities where Vaisala creates some of the world's... Read more
Blog | May 14, 2015 Humidity sensors – do you know what's inside? If you don't know, perhaps you should. If you don't know how your humidity sensor works, how can you know that you are using the right humidity... Read more
Customer case Continuous monitoring system brings peace of mind “Losing the stock would be just the tip of the iceberg. It would mean a loss of R&D investment, lost client commitments, and missed business... Read more
Blog | Aug 24, 2013 Instrument tolerances: manufacturer vs. process This week's blog comes from Vaisala's Calibration and Repair Service department: Using the instrument maker’s tolerance, there is often a higher... Read more
Blog | Aug 9, 2013 3 tips to staying sane during a quality audit Our Vancouver calibration laboratory just underwent an audit by an accreditation body. Michael Boetzkes, our North American Calibration and... Read more
