Accurate and stable measurement devices enable close control of the microenvironments surrounding semiconductor tools.
Vaisala provides compact OEM modules for relative humidity and barometric pressure.
Vaisala DRYCAP® Dew Point and Temperature Probe DMP7 is made for tight spaces and low-humidity applications.
Vaisala DRYCAP® Dew Point and Temperature Probe DMP8 is designed for industrial low-humidity applications with pressure up to 40 bars.
Vaisala HUMICAP® HM70 Handheld is designed for demanding humidity measurement in spot-checking applications. It is also ideal for field checking and calibration of Vaisala's fixed humidity instruments.
Vaisala Indigo200 series transmitters are host devices for displaying measurement values from Vaisala's Smart Humidity, Temperature, Dew Point, Moisture in Oil, CO2 and H2O2 Probes.
The Vaisala Indigo500 series transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. The Indigo500 series include multi-functional Indigo520 transmitter and Indigo510 transmitter with basic features.
The Vaisala DRYCAP® Dewpoint Transmitter DMT152 is designed for measuring low dew point in OEM applications, even down to -80°C.
Miniature size dew point transmitters DMT143 and DMT143L are ideal choices when you want to measure dew point accurately in small compressed air dryers, plastic dryers, additive manufacturing and other OEM applications.
The Vaisala HUMICAP® Humidity and Temperature Probe HMP110 is a trouble-free and cost-effective humidity transmitter with high accuracy and good stability. The power consumption is low and it has fast startup for battery-powered applications.
A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS silicon sensor technology that provides superior accuracy, sensitivity, stability and durability.