Vaisala K‑PATENTS® Semicon refractometers are compact, small-foot-print products specially designed to be integrated in a semiconductor process tool or in an ultra-clean cabinet, offering metrology for wet chemistry concentration measurements.
Explore all refractometer applications for fab chemical process monitoring and fault detection in the semiconductor industry
Here you will find product manuals, approvals and test certificates, material safety data sheets (MSDS) and software for connectivity and communications.
Vaisala K-PATENTS® Process Refractometers are used for in-line liquid concentration measurements enabling advanced and accurate process control supporting industrial automation.
Learn more about the principle, technology, and measurement behind a refractometer; refractive index.
Here you will find answers to the most typical questions regarding the process refractometer.
Vaisala and our authorized Liquid measurements distributors offer comprehensive customer care covering the entire lifecycle of Vaisala K‑PATENTS refractometers, and provide application support. See our refractometer service offering from this page.