Semicon Refractometer

Vaisala K‑PATENTS® Semicon refractometers are compact, small-foot-print products specially designed to be integrated in a semiconductor process tool or in an ultra-clean cabinet, offering metrology for wet chemistry concentration measurements. 

Refractometer applications

Explore all refractometer applications for fab chemical process monitoring and fault detection in the semiconductor industry

Library of downloads and software

Here you will find product manuals, approvals and test certificates, material safety data sheets (MSDS) and software for connectivity and communications.

What is process refractometer

Vaisala K-PATENTS® Process Refractometers are used for in-line liquid concentration measurements enabling advanced and accurate process control supporting industrial automation.

Learn more about the principle, technology, and measurement behind a refractometer; refractive index.

Frequently asked questions

Here you will find answers to the most typical questions regarding the process refractometer.


Vaisala and our authorized Liquid measurements distributors offer comprehensive customer care covering the entire lifecycle of Vaisala K‑PATENTS refractometers, and provide application support. See our refractometer service offering from this page.