Environmental compensations

Especially semiconductor manufacturing processes require accurate and very fast barometric pressure, and also relative humidity, measurements to compensate the Laser Interferometer length measurement.


 

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Combined Pressure, Humidity and Temperature Transmitter PTU300

PTU300 Combined Pressure, Humidity and Temperature Transmitter

Measures humidity, temperature, and barometric pressure in two accuracy classes. The PTU300 series features a large numerical and graphical display.

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PTB330 Digital Barometer

PTB330 Digital Barometer

A new generation barometer designed for a wide range of high-end atmospheric pressure measurement. The PTB330 can be used for aviation, professional meteorology, and for demanding industrial pressure measurement applications.

PTB210 Digital Barometer

PTB210 Digital Barometer

Excellent solution for outdoor installations. Operates in a wide temperature range. The housing provides IP65 (NEMA4) compliant protection against sprayed water.

HMT330 Series Humidity and Temperature Transmitters

Top-of-the-line model for demanding industrial applications. A large numerical and graphical display. A fully configurable transmitter.

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HMT330 Series Humidity and Temperature Transmitters

Top-of-the-line model for demanding industrial applications. A large numerical and graphical display. A fully configurable transmitter.


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This page was printed from www.vaisala.com on May 12, 2008
URL: http://www.vaisala.com/instruments/applications/semiconductor/environmentalcompensations